Stories|Scalable Infrared Sensors: Affordable Solutions for Industry and Science
Scalable Infrared Sensors: Affordable Solutions for Industry and Science
Electronics and energy industry
Wafer-Scale CMOS Technology for GeSn Photodetectors: Advancing Room-Temperature Infrared Sensing
Helmholtz-Zentrum Dresden-Rossendorf (HZDR) has achieved a significant milestone in the development of cost-effective, scalable GeSn photodetector technology for extended short-wave infrared (SWIR) applications. Supported by an €89,000 grant in 2023, the project successfully transitioned from small-scale fabrication to wafer-scale production, opening new avenues for consumer, industrial, and scientific applications.
Key Achievements
This project redefined the fabrication of GeSn photodetectors, moving from 10x10 mm² samples to full 100 mm germanium wafers using a CMOS-compatible process. The innovative combination of ion implantation and flash lamp annealing allowed precise doping and high-throughput manufacturing. Key advancements included:
- Transformation of the Sn and P implantation process, flash lamp annealing, UV photolithography, and metal deposition for 3-inch wafers.
- Development and testing of lateral GeSn p-n photodetector arrays, showcasing competitive performance metrics such as responsivity, detectivity, and external quantum efficiency.
- Delivery of a minimum viable product (MVP), validated by discussions with industry partners like InfraTec GmbH.
Bridging Science and Industry
This CMOS-compatible technology represents a major step forward in photodetector development. It offers a cost-effective alternative to traditional materials like InGaAs and HgCdTe, which are expensive, rely on toxic elements, and lack CMOS compatibility. The scalability achieved through this project enhances the potential for integration into various sectors, including automotive, consumer electronics, healthcare, and surveillance.
By aligning with industry needs, the project lays the groundwork for future collaborations with companies such as InfraTec GmbH, Jenoptik AG, or Intel Corporation. The demonstrator and MVP have already sparked discussions, validating the market interest in this innovative technology.
Future Outlook
With a proven process for wafer-scale production, the project positions HZDR at the forefront of SWIR technology development. Next steps include refining device parameters, optimizing performance, and expanding partnerships to drive commercialization. This work not only accelerates the adoption of GeSn photodetectors but also sets the stage for future innovations in CMOS-integrated sensing technologies.
Are you interested in collaborating on Advancing Room-Temperature Infrared Sensing? Feel free to contact us at Info@Hi-Acts.de.